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Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technology
Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process
Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems
Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology
Near-field scanning optical microscopy: electromagnetic coupling between the aperture tip and the sample
MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectives
Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion