15 March 1998 MEMS-based diffractive optical-beam-steering technology
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This paper presents some results from phase-1 research into developing a beam steerer based on micro-mechanical diffractive elements. The position of these elements is electrostatically controlled, to allow dynamic programming of a 2D phase function. Feasibility prototypes were constructed in the MUMPs polysilicon surface micromachine process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David A. Winick, David A. Winick, Bruce E. Duewer, Bruce E. Duewer, Som Chaudhury, Som Chaudhury, John M. Wilson, John M. Wilson, John Tucker, John Tucker, Umut Eksi, Umut Eksi, Paul D. Franzon, Paul D. Franzon, } "MEMS-based diffractive optical-beam-steering technology", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302411; https://doi.org/10.1117/12.302411

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