MEMS-based microgratings: preliminary results of novel configurations

James Castracane; Mikhail A. Gutin

doi:10.1117/12.302396

15 March 1998 MEMS-based microgratings: preliminary results of novel configurations

James Castracane, Mikhail A. Gutin

Proceedings Volume 3276, Miniaturized Systems with Micro-Optics and Micromechanics III; (1998) https://doi.org/10.1117/12.302396
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The advent of micromachining has opened new doors for reducing the size and weight of conventional systems. A significant example is in the area of optics in which the size reduction can be exploited to produce ultra-miniature systems using MEMS device as the sensing or control elements. Using MEMS-based fabrication methods (the MUMPS runs), a series of optical diffraction gratings has been produced to examine limitations on the production methods and explore alternative applications. These devices consist of a variety of structures including single gratings, arrays of gratings and multi-periodic gratings. These devices are based on 3D architectures which can be adjusted in real time using electrostatic attraction from custom segmented electrode structures. The gratings were released and packaged for laboratory tests. Selected packaged devices were equipped with windows and integrated into a compact spectrograph to document spectral quality and performance. Preliminary results of mechanical, optical and electrical tests will be discussed.

Citation Download Citation

James Castracane and Mikhail A. Gutin "MEMS-based microgratings: preliminary results of novel configurations", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302396

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