Paper
15 March 1998 MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectives
Jean Frederic Clerc, Patrick Louis Mottier
Author Affiliations +
Abstract
We give a quick overview of what and where in Europe new MOEMS technologies and products are arriving. We will mainly focus on developments funded by the European Community and especially on Europractice II partners existing products and technologies and particularly on the Competence Center Number 3 whose LETI and the authors are the coordinator.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean Frederic Clerc and Patrick Louis Mottier "MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectives", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302394
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KEYWORDS
Microopto electromechanical systems

Sensors

Integrated optics

Silicon

Optics manufacturing

Waveguides

Free space optics

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