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15 March 1998 Optical measurement of LIGA milliengine performance
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Understanding the parameters that affect the performance of milliscale and microscale actuators is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. This paper discusses the development of optical techniques for motion measurements of LIGA fabricated milliengines. LIGA processing permits the fabrication of precision millimeter-sized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. In addition, tolerances of 1 part in 103 to 104 may be maintained in millimeter sized components with this processing technique. Optical techniques offer a convenient means for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. Optical techniques can also be used to provide feedback signals needed for control and sensing of the state of the machine. Optical probe concepts and experimental data obtained using a milliengine developed at Sandia National Laboratories are presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fred M. Dickey, Scott C. Holswade, Todd R. Christenson, Ernest J. Garcia, and Marc A. Polosky "Optical measurement of LIGA milliengine performance", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998);


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