15 March 1998 Piezoelectrical elements for micro-optical applications
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Abstract
Piezoelectrical elements offer best parameters for high resolution and high dynamic motions. However they can provide only motions in the micrometers range. Using piezoelectrical translation systems in MOEM devices, different systems such as optical fiber switches, intensity modulators and choppers can be developed. These systems have excellent dynamical properties. The integration of piezoelectrical actuators into a special accommodation with solid state hinges provides very compact systems with a high straightness of their motion. By this way the electrical capacitance of the actuating system can be reduced and the system can be minimized in its dimensions. The lower capacitance offers advantages for dynamic work with respect to power consumption. From the mechanical side, each piezoactuator has a certain resonant frequency. The system can be considered as an oscillating system with a high finesse. The excitation of the resonant frequency (by short voltage pulses) leads to parasitic oscillations on the full system. This effect can influence important parameters such as switching time, coupling efficiencies, cross talk behavior etc. The paper presents general aspects for optimizing high dynamic systems. Different methods of reducing parasitic oscillation will be discussed. First demonstration of piezoelectrical MOEM devices will be presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernt Goetz, Bernt Goetz, Thomas Martin, Thomas Martin, Peter Buecker, Peter Buecker, } "Piezoelectrical elements for micro-optical applications", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302400; https://doi.org/10.1117/12.302400
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