GaAs/AlyGa1-yAs waveguide leakage loss reduction by inserting thin AlAs/AlxGa1-xAs layers into the bottom cladding

Wei Jian Wang; H. R. Khazaei; Ezio Berolo; P. Maigne; David Coulas; Julian P. Noad; P. Borkowski

doi:10.1117/12.298198

12 January 1998 GaAs/Al_yGa_1-yAs waveguide leakage loss reduction by inserting thin AlAs/Al_xGa_1-xAs layers into the bottom cladding

Wei Jian Wang, H. R. Khazaei, Ezio Berolo, P. Maigne, David Coulas, Julian P. Noad, P. Borkowski

Author Affiliations +

Proceedings Volume 3278, Integrated Optic Devices II; (1998) https://doi.org/10.1117/12.298198
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

In this paper, we present the simulation, fabrication and measurement results of GaAs/Al_yGa_1-yAs waveguides having a cladding layer nearly 50 percent thinner than the conventional cladding layer thickness, while still achieving an equivalent optical performance. These waveguides are realized by inserting thin layers of Al_xGa_1-xAs in the Al_yGa_1-yAs bottom cladding layers. The waveguide layers are grown by standard organo-metallic vapor phase epitaxy with the ridge waveguides defined by reactive ion etching. The composition, thickness and the position f the inserted Al_xGa_1-xAs layers were optimized so as to maintain the original waveguide performance. The channel waveguide propagation losses are about 1 dB/cm, measured by the Fabry- Perot cavity and the cutback methods. These results were found to be consistent with simulations. The insertion of the thin layers of Al_xGa_1-xAs in the specific optimized device performance.

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Wei Jian Wang, H. R. Khazaei, Ezio Berolo, P. Maigne, David Coulas, Julian P. Noad, and P. Borkowski "GaAs/Al_yGa_1-yAs waveguide leakage loss reduction by inserting thin AlAs/Al_xGa_1-xAs layers into the bottom cladding", Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); https://doi.org/10.1117/12.298198

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KEYWORDS

Cladding

Waveguides

Gallium arsenide

Reactive ion etching

Aluminum

Gallium

Channel waveguides

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