Integrated optic vertical polarization splitters using polymers

Sean M. Garner; Vadim Chuyanov; Antao Chen; Sang-Shin Lee; William H. Steier; Larry Raymond Dalton

doi:10.1117/12.298220

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12 January 1998 Integrated optic vertical polarization splitters using polymers

Sean M. Garner, Vadim Chuyanov, Antao Chen, Sang-Shin Lee, William H. Steier, Larry Raymond Dalton

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Proceedings Volume 3278, Integrated Optic Devices II; (1998) https://doi.org/10.1117/12.298220
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We present design considerations and fabrication results for a vertically integrated waveguide polarization splitter. Fabrication techniques of shadow reactive ion etching (RIE) and variable photolithography exposure produced the required vertical waveguide structures. The fabricated vertical waveguide bends exhibit excess loss of only 0.2dB. By constructing this vertical bend with a birefringent polyimide, simulation results show the possibility of a polarization splitter with an extinction ratio of over 15dB. We demonstrate preliminary waveguide experiments showing the practicality of these structures as three dimensionally integrated optical devices.

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Sean M. Garner, Vadim Chuyanov, Antao Chen, Sang-Shin Lee, William H. Steier, and Larry Raymond Dalton "Integrated optic vertical polarization splitters using polymers", Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); https://doi.org/10.1117/12.298220

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