12 January 1998 Integrated optical devices achieved by sol gel process
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We present design considerations and fabrication results for a vertically integrated waveguide polarization splitter. Fabrication techniques of shadow reactive ion etching and variable photolithography exposure produced the required vertical waveguide structures. The fabricated vertical waveguide bends exhibit excess loss of only 0.2dB. By constructing this vertical bend with a birefringent polyimide, simulation results show the possibility of a polarization splitter wit an extinction ratio of over 15dB. We demonstrate preliminary waveguide experiments showing the practicality of these structures as 3D integrated optical devices.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Coudray, Paul Coudray, Pascal Etienne, Pascal Etienne, Jerome Porque, Jerome Porque, Yves Moreau, Yves Moreau, S. Iraj Najafi, S. Iraj Najafi, } "Integrated optical devices achieved by sol gel process", Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); doi: 10.1117/12.298209; https://doi.org/10.1117/12.298209


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