7 July 1998 Heavy p-type doping of ZnSe-based II-VI semiconductors using an excimer laser
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Abstract
p-type doping of wide band gap II-VI semiconductors is a key technology to form the ohmic contact with metal electrodes in device fabrications. Using an alkaline metal compound such as K2S, Na2Se or Na2Te which contains dopant atoms, excimer laser doping experiments were carried out for ZnSe and CdTe. Influence of the electrical properties on this treatment was mainly measured by means of the Hall measurement. The resistivity of ZnSe drastically decreased from 105 to 10-2 Ohm cm and the value of hole carrier concentration increased up to 4.8 X 1019 cm-3. For CdTe also resistivity decreased from 105 to 10-1 Ohm cm. Formation of p-type ohmic contact in ZnSe p-n diode was also investigated.
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Yoshinori Hatanaka, Yoshinori Hatanaka, Toru Aoki, Toru Aoki, Madan Niraula, Madan Niraula, Y. Aoki, Y. Aoki, Yoichiro Nakanishi, Yoichiro Nakanishi, } "Heavy p-type doping of ZnSe-based II-VI semiconductors using an excimer laser", Proc. SPIE 3283, Physics and Simulation of Optoelectronic Devices VI, (7 July 1998); doi: 10.1117/12.316725; https://doi.org/10.1117/12.316725
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