7 July 1998 Thermo-optic properties of aluminum nitride waveguides
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Abstract
Aluminum nitride (AlN) thin film is a wide bandgap semiconductor which shows great potential for opto- electronic applications in blue and ultraviolet regions. A prism-thin film coupling technique, and an automatic temperature controlling device have been used to study the thermo-optic properties of single crystalline aluminum nitride thin films grown on sapphire substrates by low pressure metal organic chemical vapor deposition. The temperature coefficient of refractive index ne for AlN is determined to be 6 X 10-5/ degree(s)C at a wavelength of 632.8 nm.
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Xiao Tang, Xiao Tang, Yifang Yuan, Yifang Yuan, Kobchat Wongchotigul, Kobchat Wongchotigul, Michael G. Spencer, Michael G. Spencer, Han Ying, Han Ying, Zhang Ling, Zhang Ling, } "Thermo-optic properties of aluminum nitride waveguides", Proc. SPIE 3283, Physics and Simulation of Optoelectronic Devices VI, (7 July 1998); doi: 10.1117/12.316647; https://doi.org/10.1117/12.316647
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