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20 April 1998 Combined photonics and MEMS function demonstration
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Abstract
We discuss tow examples of integration of micro- electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 micrometers is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Olga Blum-Spahn, Mial E. Warren, Hong Q. Hou, Richard Franklin Carson, Kent D. Choquette, M. Steven Rodgers, and Jeffry J. Sniegowski "Combined photonics and MEMS function demonstration", Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); https://doi.org/10.1117/12.305469
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