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5 May 1998 Efficient waveguide couplers using tilted gratings for optoelectronic interconnects
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Abstract
Surface relief gratings with tilted grating profiles have been studied for efficient optical signal coupling for polymeric waveguide based optoelectronic interconnects. In this article the theoretical formulation used to calculate the diffraction efficiency in a pre-defined direction is discussed. The designed gratings provide an effective unidirectional surface-normal optical coupling for polymer-based optoelectronic interconnects. The gratings with a tilt-angle of 32 degrees and periods ranging from 0.5 to 3 micrometers were fabricated. Both surface-normal input and output grating couplers have been demonstrated in polyimide waveguides on silicon substrate.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianhua Gan, Bipin Bihari, Linghui Wu, Feiming Li, Michael Dubinovsky, Ray T. Chen, and Suning Tang "Efficient waveguide couplers using tilted gratings for optoelectronic interconnects", Proc. SPIE 3288, Optoelectronic Interconnects V, (5 May 1998); https://doi.org/10.1117/12.307569
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