20 April 1998 New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer
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Abstract
A new single-mode optical waveguide on a ceramic substrate has been developed to obtain opto-electronic multichip modules for use of high operating frequencies. Propagation loss of the single-mode optical waveguide formed on ceramic substrate is 0.14dB/cm for 1.3 micrometers wavelength.It is fabricated utilizing a siloxane polymer. The film of siloxane polymer can cut-off surface roughness of ceramic substrate. So the optical waveguide on ceramic substrate utilizing the siloxane polymer has fine optical characteristics.
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Yuriko Ueno, Yuriko Ueno, Katsuhiro Kaneko, Katsuhiro Kaneko, Shigeo Tanahashi, Shigeo Tanahashi, } "New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer", Proc. SPIE 3289, Micro-Optics Integration and Assemblies, (20 April 1998); doi: 10.1117/12.305477; https://doi.org/10.1117/12.305477
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