18 June 1998 Recent advances in high-quality HOE development
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The paper discusses the development of 2D HOEs for effective laser beam splitting. The relationship between the HOE efficiency and the number of phase levels is investigated. The use of more than eight phase levels is shown to be hardly reasonable because it does not offer any appreciable increase in HOE efficiency, complicates the fabrication and may give rise to many errors. The computer simulation allowed us to predict the effect of fabrication errors and set the requirements on accuracy. The paper also describes a technique of direct e-beam writing of multilevel phase reliefs and control of the relief depth. The technique allowed us to make beamsplitters with parameters agreeing closely with calculated values.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrei L. Mikaelian, Aleksandr N. Palagushkin, Sergei A. Prokopenko, M. V. Politov, "Recent advances in high-quality HOE development", Proc. SPIE 3291, Diffractive and Holographic Device Technologies and Applications V, (18 June 1998); doi: 10.1117/12.310578; https://doi.org/10.1117/12.310578

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