16 April 1998 Computer-aided modeling applied to microengineered pressure sensors
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Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305588
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India
The development of miniaturized diaphragm structures is highly significant to the successful realization of many microengineered devices. Most industrial designs of physical sensors are now based upon detailed finite element modeling of the mechanical microstructures using software currently available for conventional mechanics. This paper investigates the effects of miniaturization on corrugated diaphragm structures through the use of advanced computer modeling and simulation techniques. By developing detailed models of the diaphragm structures using commercial finite element analysis software it is possible to investigate the effects on diaphragm performance when diaphragms are scaled from a macro level (eg. 10 mm diameter) down to a micro level (< 1 mm diameter). Case studies are presented and comparisons are made with research work published by other workers. With subsequent sensitivity analysis it is possible to explore the critical design parameters of the microengineered diaphragms, and parameterize the diaphragm such that its performance will be compensated to some degree from limitations imposed by processing parameters.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Georgaras, C. Georgaras, Noel D. Samaan, Noel D. Samaan, } "Computer-aided modeling applied to microengineered pressure sensors", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305588; https://doi.org/10.1117/12.305588

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