Paper
16 April 1998 Recent developments in ceramic actuators
Kenji Uchino
Author Affiliations +
Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305551
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India
Abstract
In these several years, piezoelectric and electrostrictive materials have become key components in smart actuator/sensor systems such as precision positioners, miniature ultrasonic motors and adaptive mechanical dampers. This paper reviews recent developments of piezoelectric and related ceramic actuators with particular focus on the improvement of actuator materials, device designs and drive/control techniques of actuators. Developments will be compared among USA, Japan and Europe.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenji Uchino "Recent developments in ceramic actuators", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305551
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Actuators

Ceramics

Ultrasonics

Printing

Cameras

Electrodes

Metals

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