Integrated MEMS together with signal-conditioning electronics on the same chip appears to be the ultimate solution to realizing smart computer devices integratable into larger systems. This in principle will lead to systems with decentralized intelligence leading to applications in numerous fields. It is conceived that such devices would be the product of merging two mature technologies, that of microsensors and that of IC manufacture which is enjoying a well established success. Using common and suitable materials it is reasonable to expect a high degree of compatibility with little modification to standard processes. The various aspects of this co-integration will be analyzed and factors critical to the viability of the process, that go beyond mere technical feasibility will be highlighted. Australian research in this area is strong and continues to grow. We will pinpoint opportunities and constraints to the promising prospect of smart electronics and MEMS.
Alex Hariz, Alex Hariz,
"Smart electronics and microengineering: the Australian focus", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305549; https://doi.org/10.1117/12.305549