20 July 1998 High-temperature pressure transducer interface
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This paper describes a high-temperature (250 degree(s)C) pressure-transducer interface for resistive Wheatstone bridges. The long-term drift of the smart sensor, i.e., the (pressure) sensor plus its interface electronics, will be determined by the drift of the sensor only. A continuous three-signal auto-calibration sequence of the interface electronics keeps the transducer interface virtually free of long-term drift. A patented low-drift pre-amplifier forms an essential element in this system. The high-temperature operation of the transducer interface has been investigated from both an electronic and a packaging point of view. The system has been realized by combining CMOS ASICs with a thick-film packaging technology. The pressure-transducer interface works up to 250 - 275 degree(s)C with 15 - 16 bits accuracy.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul C. de Jong, Paul C. de Jong, Gerard C. M. Meijer, Gerard C. M. Meijer, "High-temperature pressure transducer interface", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320180; https://doi.org/10.1117/12.320180

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