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20 July 1998 High-temperature pressure transducer interface
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This paper describes a high-temperature (250 degree(s)C) pressure-transducer interface for resistive Wheatstone bridges. The long-term drift of the smart sensor, i.e., the (pressure) sensor plus its interface electronics, will be determined by the drift of the sensor only. A continuous three-signal auto-calibration sequence of the interface electronics keeps the transducer interface virtually free of long-term drift. A patented low-drift pre-amplifier forms an essential element in this system. The high-temperature operation of the transducer interface has been investigated from both an electronic and a packaging point of view. The system has been realized by combining CMOS ASICs with a thick-film packaging technology. The pressure-transducer interface works up to 250 - 275 degree(s)C with 15 - 16 bits accuracy.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul C. de Jong and Gerard C. M. Meijer "High-temperature pressure transducer interface", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998);

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