Integral design of a microacoustic wave-based sensor device

G. W. Lubking; Bernhard Jakoby; Michael J. Vellekoop

doi:10.1117/12.320177

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20 July 1998 Integral design of a microacoustic wave-based sensor device

G. W. Lubking; Bernhard Jakoby; Michael J. Vellekoop

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Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320177
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

Every oscillator contains an element which determines the frequency of the oscillator. A delay-line can be such an element. An oscillator which uses a delay-line puts specific demands on the electrical circuits needed in this oscillator. In this paper we look systematically at the parameters involved in the design of the electronic circuitry. In order to be able to do this properly we first determine the electrical behavior of an acoustical delay- line with the help of an equivalent circuit. Consequently we look at the parameters of the electronic circuit which are important for realization of a highly stable oscillator with special attention for the fact that the frequency determining element is a delay-line. With the help of this analysis we were able to find design criteria. According to this criteria we built actual circuits by using monolithic integration and measured them. The result of these measurements are given.

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G. W. Lubking, Bernhard Jakoby, and Michael J. Vellekoop "Integral design of a microacoustic wave-based sensor device", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320177

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