Smart programmable wireless microaccelerometers

Vijay K. Varadan; Hareesh Subramanian; Vasundara V. Varadan

doi:10.1117/12.320186

20 July 1998 Smart programmable wireless microaccelerometers

Vijay K. Varadan, Hareesh Subramanian, Vasundara V. Varadan

Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320186
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

The integration of MEMS, SAW devices and required microelectronics and conformal antenna to realize a programmable wireless accelerometer is presented in this paper. This unique combination of technologies results in a novel accelerometer that can be remotely sensed by a microwave system with the advantage of no power requirements at the sensor site. The microaccelerometer presented is simple in construction and easy to manufacture with existing silicon micromachining techniques. Programmable accelerometers can be achieved with splitfinger interdigital transducers (IDTs) as reflecting structures. If IDTs are short circuited or capacitively loaded, the wave propagates without any reflection whereas in an open circuit configuration, the IDTs reflect the incoming SAW signal. The programmable accelerometers can thus be achieved by using an external circuitry on a semiconductor chip using hybrid technology. The relatively small size of the sensor makes it an ideal conformal sensor. The accelerometer finds application as air bag deployment sensors, vibration sensors for noise control, deflection and strain sensors, inertial and dimensional positioning systems, ABS/traction control, smart suspension, active roll stabilization and four wheel steering. The wireless accelerometer is very attractive to study the response of a `dummy' in automobile crash test.

Citation Download Citation

Vijay K. Varadan, Hareesh Subramanian, and Vasundara V. Varadan "Smart programmable wireless microaccelerometers", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320186

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available