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20 July 1998 Surface-micromachined optical polarizers for magneto-optical data storage
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Polarizers and polarization beam splitters are the most important devices in magneto-optical readout system. With a commercially available foundry polysilicon surface micromachining process (Multi-User Means ProcesS, or MUMPS) offered by MCNC (Mems Center at North Carolina), we have realized, on a single Si chip, an integrated polarization beam splitting system with a binary phase Fresnel lens for collimation. Polarization extinction ratios of 10 dB for the transmitted light and over 20 dB for the reflected light have been achieved. The whole system is prealigned using Computer-Aided Design on a Si substrate and is then lifted up perpendicular to the substrate after structure release.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chuan Pu, Zuhua Zhu, and Yu-Hwa Lo "Surface-micromachined optical polarizers for magneto-optical data storage", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998);

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