20 July 1998 Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring
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Abstract
An acoustic emission (AE) sensor has been developed by Honeywell Technology Center for avionics, industrial control, and military applications. The AE sensor design is based on an integrated silicon microstructure, a resonant microbeam with micron-level feature size, and frequency sensitivity up to 500 kHz. The AE sensor has been demonstrated successfully in the laboratory test environment to sense and characterize a simulated AE even for structural fatigue crack monitoring applications. The technical design approach and laboratory test results are presented.
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Jeffrey N. Schoess, J. David Zook, "Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320185; https://doi.org/10.1117/12.320185
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