21 July 1998 Adaptive interferometer measurement of the piezoelectric and electro-optic coefficients of the spin-coated PZT thin films
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Abstract
A novel interferometric modulation technique for optical thin film testing using GaAs:Cr adaptive photodetectors based on the effect of the non-steady-state photoelectromotive force is presented. The technique needs no special vibroinsulation and automatically adjusts and keeps the operation point of the interferometer. Two different interferometric setups with GaAs:Cr adaptive photodetectors are reported. A modified Mach-Zehnder interferometer with adaptive photodetector is used to study piezoelectric coefficient, d$_33) of the thin film and the influence of the bending motion of the substrate. A two beams polarization interferometer with adaptive photodetector is developed for effective differential Pockels coefficient, rc equals r33-(n0/ne)$=3)r13, measurement. It is shown that the proposed two beams polarization technique allows measurement of the Pockels coefficient of thin films with a strong Fabry-Perot effect usually present in ferroelectric thin film. Strong hysteresis effect with a slightly asymmetric form of the hysteresis loop was observed at the dependence of the d33 and re coefficients of the PZT thin film from the DC electric field. The values of d33 and Re are in agreement with known data.
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Vasilii V. Spirin, Vasilii V. Spirin, Changho Lee, Changho Lee, Kwangsoo No, Kwangsoo No, Igor A. Sokolov, Igor A. Sokolov, } "Adaptive interferometer measurement of the piezoelectric and electro-optic coefficients of the spin-coated PZT thin films", Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); doi: 10.1117/12.316958; https://doi.org/10.1117/12.316958
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