21 July 1998 Optical-fiber-interconnected MEMS sensors and actuators
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Abstract
Microelectromechanical systems or MEMS are miniature devices that have several advantages over conventional sensing and actuating technology. MEMS devices benefit form well developed integrated circuit production methods which ensure high volume, high yield processes that create low-cost sensors and actuators. OPtical fiber interconnected MEMS will provide new functionality in MEMS devices such as multiplexed operation for distributed sensing applications. This paper presents approaches in optical fiber to MEMS interfacing and some preliminary results.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael B. Miller, Michael B. Miller, Scott A. Meller, Scott A. Meller, Thomas A. Wavering, Thomas A. Wavering, Jonathan A. Greene, Jonathan A. Greene, Kent A. Murphy, Kent A. Murphy, } "Optical-fiber-interconnected MEMS sensors and actuators", Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); doi: 10.1117/12.316971; https://doi.org/10.1117/12.316971
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