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5 June 1998 Scattering from normal-incidence EUV optics
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Abstract
Measurements of nonspecular EUV scattering from Mo/Si multilayer coated mirrors have been performed. The surface power spectral density is deduced from the angular scattering distribution and in all cases is found to be in excellent agreement with surface profile measurements, by both optical and atomic force microscopy. It is demonstrated that the effects of scatter on the EUV imaging performance of a single normal incidence optic are accurately predicted from surface profile measurements.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric M. Gullikson "Scattering from normal-incidence EUV optics", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309625
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