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5 June 1998 X-ray stepper development for volume production at Canon
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We describe some results of exposure experiments using the present prototype SR stepper which Canon has developed and the novel technology development which is necessary to establish the next generation SR stepper for volume production. Concerning the technology development, we have established (1) two mirror condensing system for full field exposure, (2) ADGL alignment method, (3) magnification correction method, (4) high speed stage stepping method. By adopting these technologies, we have been developing a beta- site machine for volume production and its features and preliminary specifications are described.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kouji Uda, Nobutoshi Mizusawa, Yutaka Tanaka, Yutaka Watanabe, Hideki Ina, and Shunichi Uzawa "X-ray stepper development for volume production at Canon", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); doi: 10.1117/12.309632;


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