8 June 1998 AFM: a valid reference tool?
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Abstract
To first order, the use of AFM as a reference tool potentially offers a large improvement over pre'ious techniques for matching and calibration of on-line CL)-SEMs. However, the utility of this approach depends on the validity of the assumption that AFM precision and accuracy are relatively constant with sample type. A fullfactorial design using analysis of variations (ANOVA) has been employed in order to gauge the precision of a non-contact mode CD AFM over multiple sample types and instrument conditions. 'The effects of material layer, pattern geometry, feature shape, and tip size on AFM precision viill he presented.
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Herschel M. Marchman, Herschel M. Marchman, Nichole Dunham, Nichole Dunham, } "AFM: a valid reference tool?", Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); doi: 10.1117/12.308718; https://doi.org/10.1117/12.308718
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