SEM image sharpening by reversing the effect of a nonideal beam spot

Yaron I. Gold; Alex Goldenshtein

doi:10.1117/12.308774

8 June 1998 SEM image sharpening by reversing the effect of a nonideal beam spot

Yaron I. Gold, Alex Goldenshtein

Proceedings Volume 3332, Metrology, Inspection, and Process Control for Microlithography XII; (1998) https://doi.org/10.1117/12.308774
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

This paper presents a method for increasing the contrast-to- noise ratio and spatial resolution of SEM images. The method uses de-convolution to eliminate the blur caused by an electron beam spot that covers more than a single pixel. An approximating de-convolution algorithm with low computational complexity is also shown.

Citation Download Citation

Yaron I. Gold and Alex Goldenshtein "SEM image sharpening by reversing the effect of a nonideal beam spot", Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); https://doi.org/10.1117/12.308774

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