8 June 1998 SEM image sharpening by reversing the effect of a nonideal beam spot
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Abstract
This paper presents a method for increasing the contrast-to- noise ratio and spatial resolution of SEM images. The method uses de-convolution to eliminate the blur caused by an electron beam spot that covers more than a single pixel. An approximating de-convolution algorithm with low computational complexity is also shown.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yaron I. Gold, Alex Goldenshtein, "SEM image sharpening by reversing the effect of a nonideal beam spot", Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); doi: 10.1117/12.308774; https://doi.org/10.1117/12.308774
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