29 June 1998 Contrast enhancement by alkali-decomposable additives in quinonediazide-type positive resists
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Abstract
We have developed the new contrast enhancement method using an alkali decomposable compound. This compound is hydrophobic and water insoluble, but decomposes to water soluble hydrophilic compounds by contact with alkaline developer. This solubility change makes high dissolution contrast between exposed and unexposed area. Good profiles are obtained by addition of this compound to quinonediazide type positive resist.
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Yasunori Uetani, Jun Tomioka, Hiroshi Moriuma, Yoshiko Miya, "Contrast enhancement by alkali-decomposable additives in quinonediazide-type positive resists", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312443; https://doi.org/10.1117/12.312443
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