Monitoring of lithography modules using defect density inspection systems

Dieter Gscheidlen; Elke Hietschold; Eyal Duzi; Erez Ravid

doi:10.1117/12.312384

29 June 1998 Monitoring of lithography modules using defect density inspection systems

Dieter Gscheidlen, Elke Hietschold, Eyal Duzi, Erez Ravid

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312384
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

The aim of this paper is to present two process monitor methods concerning the early detection of process problems resulting from different components of a lithography module (so-called cluster) under conditions of deep ultraviolet lithography. The lithography clusters are monitored with bare silicon wafers which run through a normal process sequence of the cluster. Then, measurements of critical dimension and defect density are performed. The first measurement indicates whether the focus or the exposure dose run out of their target values, the latter detects defects on, within or underneath the resist which may indicate a process problem in one of the cluster parts. Since defect density measurement inspects all dies on the wafer, it was able to detect process problems that result in massive variations of pattern size when the measured values of critical dimensions were still within their specifications. This helped us to derive instructions for operators and stepper and track maintenance personnel that specify a maximum delay time between exposure and development.

Citation Download Citation

Dieter Gscheidlen, Elke Hietschold, Eyal Duzi, and Erez Ravid "Monitoring of lithography modules using defect density inspection systems", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312384

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available