29 June 1998 Techniques for the analysis of Cl- ion in TMAH
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Abstract
Fabricating integrated circuits with increasingly smaller elements mandates that the chlorine ion contents in 2.38% TMAH to be under the 50 ppb level. Previously, the interference from TMAH inhibited the analysis of chlorine ion in TMAH by ion chromatography. In this study, we present a novel technique to eliminate the annoying interference from TMAH. By using of acid type cation exchange resin Amberite IR-120, the interference from TMA+ and OH- is successfully eliminated. The TMA+ cation is retained in the exchange resin and the OH- from TMAH neutralized with the H+ released from the resin. This relatively simple scheme of cation exchange preprocessing not only eliminates the influence of TMAH, but also possesses the additional merit that the Cl- anion has remained intact through the cation exchange resin. To further increase the detection limit, on-line preconcentration by ion chromatography has been coupled with the above scheme by cation exchange resin preprocessing, via this technique, the detection limit of sub 1 ppb level is achieved with no need of adding a standard.
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Bang-Chein Ho, Mong-Ling Chang, Yu-Ping Lin, "Techniques for the analysis of Cl- ion in TMAH", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312436; https://doi.org/10.1117/12.312436
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