29 June 1998 Three-dimensional mask transmission simulation using a single integral equation method
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Abstract
A single integral equation formulation for electromagnetic scattering from three-dimensional dielectric objects is discussed. The new formulation converges significantly faster than the traditional, coupled integral equation formulation. The new formulation is extended to incorporate the exact boundary conditions for isolated mask features by using dyadic Green's functions for the stratified medium background. Results of three-dimensional phase-shifting mask simulation are presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael S. Yeung, Michael S. Yeung, Eytan Barouch, Eytan Barouch, } "Three-dimensional mask transmission simulation using a single integral equation method", Proc. SPIE 3334, Optical Microlithography XI, (29 June 1998); doi: 10.1117/12.310803; https://doi.org/10.1117/12.310803
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