Processing of diamond and ceramics by picosecond/nanosecond laser pulses in IR-UV spectral range

Taras V. Kononenko; Serge V. Garnov; Sergej M. Pimenov; Vitali I. Konov; Friedrich Dausinger

doi:10.1117/12.321584

14 September 1998 Processing of diamond and ceramics by picosecond/nanosecond laser pulses in IR-UV spectral range

Taras V. Kononenko, Serge V. Garnov, Sergej M. Pimenov, Vitali I. Konov, Friedrich Dausinger

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321584
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

Laser processing of hard materials, in particular, diamond and ceramics, demands an optimal laser system for a particular application: cutting, drilling, patterning, etc. A comparative experimental study of laser drilling of CVD diamond and 3D microstructuring of ceramics has been performed varying the main laser radiation parameters -- wavelength, pulsewidth and pulse energy. Ablation of CVD diamond films by nanosecond (5 - 9 ns) and picosecond (150 - 300 ps) pulses at three different wavelengths of 1078, 539 and 270 nm in the range of laser fluence 1 divided by 10³ J/cm² was investigated. Ablation rates at different stages of laser drilling -- for shallow craters, deep holes with aspect ratio of 3 divided by 5 and ultradeep channels (aspect ratio up to 30 divided by 40) -- were measured and compared. The effect of waveguide propagation of laser radiation in deep channel was revealed. The role of laser-plasma interaction as well as the modification of a surface layer are discussed. The results of 3D laser microstructuring of ceramics -- AlN, SiC, Al₂O₃, Si₃N₄ -- are demonstrated. The rectangular in plane structures (pockets) with typical size of 200 X 200 X 100 micrometer³ with steep walls and flat bottom were produced. The influence of radiation parameters on the quality of the tested structures, mainly, on the bottom roughness and walls steepness has been analyzed.

Citation Download Citation

Taras V. Kononenko, Serge V. Garnov, Sergej M. Pimenov, Vitali I. Konov, and Friedrich Dausinger "Processing of diamond and ceramics by picosecond/nanosecond laser pulses in IR-UV spectral range", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321584

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available