14 September 1998 Scaling of a Q-switch CO2 laser for pulsed laser deposition
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Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321599
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States
In Pulsed Laser Deposition the laser parameters pulse duration, repetition rate, and average output power are important parameters for control of the resulting film properties. In order to obtain high deposition and coverage rates the use of powerful laser radiation sources is required. A new approach is the use of Q-switch CO2 lasers, making accessible the range of kW average output powers for PLD. A common industrial fast axial gas flow rf-excited CO2-laser is equipped with a mechanical Q-switch assembly. The characteristic properties of this laser radiation source are studied by measurements of the average output power and of the spatial and temporal intensity distribution of the laser radiation. Results show, that the laser operates in multimode or in TEM10 mode depending on the use of apertures in the resonator. Variation of the electrical rf-excitation (in synchronization with the Q-switch) influences the pulse duration and shape, repetition rate, and average output power. Based on the experimental findings model calculations are carried out, in order to predict the pulse energy and average output power of the laser radiation source, when operating with different Q-switch parameters, e.g. higher repetition rates.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Husmann, Andreas Husmann, Markus Niessen, Markus Niessen, Frank Gruembel, Frank Gruembel, Ernst-Wolfgang Kreutz, Ernst-Wolfgang Kreutz, Reinhart Poprawe, Reinhart Poprawe, } "Scaling of a Q-switch CO2 laser for pulsed laser deposition", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321599; https://doi.org/10.1117/12.321599

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