The unique properties of a UV laser beam (high energy, short pulse duration) allow to transform the surface of ultrahard materials such as ceramics. In this way, a KrF excimer laser was used in this study in order to modify in selected zones, the surface of metals (aluminum alloy, titanium alloy and stainless steel) and oxides (Al2O3, ZrO2), carbide (SiC) and nitride (AlN). These ceramics possess good mechanical and thermal properties but exhibit a brittle behavior due to the granular structure. In a suitable range where the irradiated zone is melted and defects are removed, initial properties are modified (roughness, porosity, hardness, chemical composition). A cleaned and smoothed surface can be obtained without pores and cracks. These sites where corrosion attack starts are minimized and can lead to improve functions in potential industrial applications. The results presented in this work have been obtained by different analysis techniques such as scanning electron microscopy (SEM) to examine morphology, Auger spectroscopy (AES) to give chemical composition and depths profiles, mechanical tests to show roughness and hardness, grazing X-ray diffraction (XRD) to find structure.