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14 September 1998 UV and VUV efficient excilamps
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Proceedings Volume 3343, High-Power Laser Ablation; (1998)
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States
Operating parameters of powerful excilamps with different discharge geometry pumped by glow discharges, high-pressure volume discharge with UV-preionization and barrier discharge are presented. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, Cl2, KrCl*, KrF*, XeI*, XeBr*, XeCl*, XeF*, I2 and IBR molecules was obtained in rare gas or in rare gas -- F2 (CH3Br, Cl2, HCl, I2, NF3) mixtures. Excilamps with high spatial uniformity of the output, narrow emission line and high gas life-time were developed. It was shown that efficiency of luminescence of exciplex molecules KrCl* of about 30% can be obtained in high- voltage glow discharge and positive column of glow discharge. Output at (lambda) approximately 222 and 308 nm up to 200 W from single excilamp and 500 W from three excilamps operating in parallel was demonstrated. It was shown that the efficiency of barrier discharge excilamps pumped by sinusoidal pulses several tens microseconds in duration can be sufficiently improved.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, Victor S. Skakun, and Edward A. Sosnin "UV and VUV efficient excilamps", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998);

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