Accuracy potential of circular laser writing of DOEs

Vadim V. Cherkashin; Andrey A. Kharissov; Victor Pavlovich Korolkov; Voldemar Petrovich Koronkevich; Alexander G. Poleshchuk

doi:10.1117/12.302509

10 March 1998 Accuracy potential of circular laser writing of DOEs

Vadim V. Cherkashin, Andrey A. Kharissov, Victor Pavlovich Korolkov, Voldemar Petrovich Koronkevich, Alexander G. Poleshchuk

Author Affiliations +

Proceedings Volume 3348, Optical Information Science and Technology (OIST97): Computer and Holographic Optics and Image Processing; (1998) https://doi.org/10.1117/12.302509
Event: Optical Information Science and Technology, 1997, Moscow, Russian Federation

Abstract

The circular laser writing system for writing of arbitrary patterns of diffractive elements in chromium films and photoresists has been developed as an alternative method for laser or e-beam writing in x-y system of coordinates. This system is able to generate binary amplitude and continuous- tone patterns with features of less than 1 micrometers and accuracy of 0.1 micrometers on substrates up to 300 mm diameter. Construction of the circular laser writing system (CLWS) designed at the IA&E and writing strategies such as laser beam addressing in polar coordinate system are described. This article presents the overview and analysis of writing errors. The characteristics of zone plates and linear gratings fabrication and methods of errors measurement are given. The measurements of wavefront errors of binary f/1.1 zone plates and linear polar system gratings with period of less than 5 micrometers fabricated by CLWS demonstrate the high quality of writing strategy.

Citation Download Citation

Vadim V. Cherkashin, Andrey A. Kharissov, Victor Pavlovich Korolkov, Voldemar Petrovich Koronkevich, and Alexander G. Poleshchuk "Accuracy potential of circular laser writing of DOEs", Proc. SPIE 3348, Optical Information Science and Technology (OIST97): Computer and Holographic Optics and Image Processing, (10 March 1998); https://doi.org/10.1117/12.302509

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