20 April 1998 Cryogenic spectrometric ellipsometer for studying solid state optical properties
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Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306252
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine
Abstract
Cryogenic spectrometric ellipsometer (CSE) for studding solid state optical properties was developed. CSE permits determination of the optical constants of solid in the range between 0.3 and 2 micron, in temperature interval from 5 up to 300 K. CSE is used for bulk samples characterization and thin films including multilayers stacks analysis (refractive indices and absorption coefficients (pseudodielectric functions) and thickness measurement). The special small continuous flow cryostat had been designed for studies in the wide temperature range. The angles of incidence are changed from 45 to 70 degree(s) discretely by the position of the cryostat windows.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alla I. Belyaeva, Alla I. Belyaeva, T. G. Grebennik, T. G. Grebennik, "Cryogenic spectrometric ellipsometer for studying solid state optical properties", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306252; https://doi.org/10.1117/12.306252
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