20 April 1998 Optical properties of thin Al films studied by ordinary and polariton spectroellipsometry
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Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306232
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine
Abstract
The new technique of measurements of the ellipsometric parameters and the optical constants of the thin metallic films with excitation of surface polaritons by Kretschman method is elaborated. It is shown that unlike the some authors' opinion both the excitation of the polaritons on the opposite to the illuminated side and the detection of the polaritons are possible for the film with thickness less than 30 nm.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor A. Shaikevich, Pavel V. Kolesnik, Victoria Pas'ko, Vasiliy V. Prorok, "Optical properties of thin Al films studied by ordinary and polariton spectroellipsometry", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306232; https://doi.org/10.1117/12.306232
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