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20 April 1998 Raman-scattering diagnostics of the structure of hydrogenated amorphous diamond-like carbon films
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Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306245
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine
Abstract
Hydrogenated amorphous diamond-like carbon (DLC) films produced by RF-glow discharge deposition from hydrocarbon mixtures in a parallel diode-type plasma reactor were investigated. The DLC films were obtained at various gas mixture compositions and bias voltages (Vb). Raman spectra of DLC films in the range 1000 - 1800 cm-1 were analyzed. Our results are given in terms of I(D)/I(G) intensity ratio, bands position, and width (FWHM) as a function of bias voltage and gas mixture. The analysis of Raman spectra shows that bias voltage value is critical for the DLC films structure. The increase of Vb from -200 V to -700 V results in the essential high-frequency shift of G- and D-bands and change of their intensities ratio I(D)/I(G) from 0.64 (Vb equals 200 V) to 3.2 (Vb equals 700 V). Similar high-frequency shift, change of FWHM and I(D)/I(G) intensities ratio were observed at the variation of methane concentration in gas mixture composition from 100 to 20%.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mikhail Ya. Valakh, O. V. Vasylyk, A. G. Gontar, and A. M. Kutsay "Raman-scattering diagnostics of the structure of hydrogenated amorphous diamond-like carbon films", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306245
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