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20 April 1998 Random error behavior for rotating-analyzer ellipsometers
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Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306258
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine
Abstract
The article gives a new approach for the consideration of the precision reachable by rotating-analyzer ellipsometers. Presented results approve all qualitative conclusions of the previous article on this topic, but the general equations and numerical results are different. Additionally this article treats the problem of optimizing the measurements of ellipsometric angles separately. It is shown, measured (Psi) and (Delta) are correlated for such type of ellipsometers. For most real in practice short-noise-limited case a good rule of thumb is proposed, which gives the compromise for suboptimize measurements as (rho) , so (Psi) and (Delta) at the same time. It is proved, as all sources of noise work simultaneously, as well as for null-ellipsometry it is impossible to make measurements at the Brewster angle with rotating-analyzer ellipsometers.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene G. Bortchagovsky "Random error behavior for rotating-analyzer ellipsometers", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306258
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