22 July 1998 Design and performance of 256x256 bolometer-type uncooled infrared detector
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Abstract
This paper discusses the design and performance of a 256 X 256 bolometer-type uncooled infrared detector. First, model calculations are carried out to clarify the relations of the noise equivalent temperature difference (NETD) to the electrical properties of the bolometer material. The properties are mainly resistivity, the temperature coefficient of resistance (TCR) and 1/f noise. To obtain real-time images with NETD values smaller than 0.15 K for F/1 optics, vanadium oxide thin film was developed as the bolometer material, having a sheet resistance range of 5 - 50 k(Omega) /square and a TCR value of -2%/K. This material did not exhibit thermochroism like VO2(A), because it was identified as VO2(B). The bolometer-array was statistically evaluated and put into the infrared camera. Finally, a thermal image with a NETD of 0.15 K was obtained.
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Hideo Wada, Mitsuhiro Nagashima, Naoki Oda, Tokuhito Sasaki, Akihiro Kawahara, Masayuki Kanzaki, Yoshio Tsuruta, Tohru Mori, Shouhei Matsumoto, Takeshi Shima, Minoru Hijikawa, Nanao Tsukamoto, Hideki Gotoh, "Design and performance of 256x256 bolometer-type uncooled infrared detector", Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); doi: 10.1117/12.317635; https://doi.org/10.1117/12.317635
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