4 September 1998 Thin film resonators for TNT vapor detection
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Progress on the development of a miniature mass transducer for low level vapor detection is described. Thin-film bulk acoustic wave resonators (TFRs) are fabricated with AlN as the piezoelectric layer onto an acoustically reflecting solid substrate. Q's of 200 at 2 GHz have been measured. Comparison of the sensitivity of these 2 GHz TFRs with 250 MHz surface acoustic wave resonators is made. A set of TFRs with species selective coatings has the potential of detecting TNT vapor at the sub PPT level. Detection of 5 ppb TNT with a signal to noise of 200:1 is demonstrated.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul H. Kobrin, Paul H. Kobrin, Charles Seabury, Charles Seabury, Christopher Linnen, Christopher Linnen, Alan B. Harker, Alan B. Harker, Russell Chung, Russell Chung, Robert Andrew McGill, Robert Andrew McGill, Paul J. Matthews, Paul J. Matthews, } "Thin film resonators for TNT vapor detection", Proc. SPIE 3392, Detection and Remediation Technologies for Mines and Minelike Targets III, (4 September 1998); doi: 10.1117/12.324215; https://doi.org/10.1117/12.324215

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