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31 March 1998 Investigation of micro-opto-electro-mechanical components with a holographic microscopic interferometer
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Abstract
Holographic interferometry with three illumination directions can be applied to determine all components of a displacement vector without previous knowledge of the main deformation direction. Combined with a microscopic arrangement this method is utilized for the investigation of the operating parameters of sensor micro-components. The interferometer is adapted to the microscopic demands by conjugate reconstruction. Matching holographic and microscopic requirements is the fundamental assumption for correct operation of the holographic microscope. By the application of all advantages of conjugate reconstruction the holographic microscope has been optimized in optical and numerical parameters for the evaluation of all components of the deformation vector. Phase shifting and carrier fringe techniques have been applied for interferogram evaluation according to the object shape and deformation behavior. When absolute values of the deformation were already determined, electro-optic holography can be used for routine measurements because of its time savings. The method was used for the calibration of cantilevers for micromechanical sensors, the determination of the deformations of a circular micromembrane, and a solder joint in a microelectronic printed circuit boards. The influence of different object orientation on the measurement results was investigated additionally.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guenther K.G. Wernicke, Oliver Kruschke, Nazif Demoli, and Hartmut Gruber "Investigation of micro-opto-electro-mechanical components with a holographic microscopic interferometer", Proc. SPIE 3396, Nondestructive Evaluation of Materials and Composites II, (31 March 1998); https://doi.org/10.1117/12.301528
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