Ablation threshold and plasma analyses in the PLD process

Ileana Apostol; Razvan Stoian; C. Luculescu; Razvan V. Dabu; Aurel Stratan

doi:10.1117/12.308623

26 May 1998 Ablation threshold and plasma analyses in the PLD process

Ileana Apostol; Razvan Stoian; C. Luculescu; Razvan V. Dabu; Aurel Stratan

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Proceedings Volume 3404, ALT'97 International Conference on Laser Surface Processing; (1998) https://doi.org/10.1117/12.308623
Event: ALT '97 International Conference on Laser Surface Processing, 1997, Limoges, France

Abstract

UV laser induced ablation of YBCO superconducting targets was studied in the initial and late evolution stages in order to control and optimize the thin film deposition process. The optimum irradiation energy was estimated using an acoustic method allowing ablation threshold and congruent ablation threshold estimation. The ablation threshold dependence on incident laser spot area and target density was studied also and recommends that the proper fluence has to be considered as a function of specific irradiation conditions. Plasma expansion analyses was performed in order to estimate the parameters that control the composition and energy of the ablated particles. Temporal and spatial resolved spectra were recorded and evidenced a high density of ionized species in the initial expansion stages, atomic emission being significant at late stages or in colder regions of the plume, where the oxide emission becomes also notable. Also a supplementary IR laser radiation focused in front of the plume for IR oxygen dissociation evidenced the oxidation enhancement at the interaction of the dissociation front with the plume species.

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Ileana Apostol, Ileana Apostol, Razvan Stoian, Razvan Stoian, C. Luculescu, C. Luculescu, Razvan V. Dabu, Razvan V. Dabu, Aurel Stratan, Aurel Stratan, } "Ablation threshold and plasma analyses in the PLD process", Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); doi: 10.1117/12.308623; https://doi.org/10.1117/12.308623

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