Molten targets in pulsed laser deposition

Tamas Szoerenyi; Zoltan Kantor; Zsolt Toth

doi:10.1117/12.308595

26 May 1998 Molten targets in pulsed laser deposition

Tamas Szoerenyi, Zoltan Kantor, Zsolt Toth

Author Affiliations +

Proceedings Volume 3404, ALT'97 International Conference on Laser Surface Processing; (1998) https://doi.org/10.1117/12.308595
Event: ALT '97 International Conference on Laser Surface Processing, 1997, Limoges, France

Abstract

An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free film deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium films by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at roomtemperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either. Keywords: thin films, pulsed laser deposition, PLD, particulates

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Tamas Szoerenyi, Zoltan Kantor, and Zsolt Toth "Molten targets in pulsed laser deposition", Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); https://doi.org/10.1117/12.308595

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