2 July 1998 New studies of reactive pulsed laser deposition
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Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312749
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania
Abstract
We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH4. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ion N. Mihailescu, Ion N. Mihailescu, Eniko Gyorgy, Eniko Gyorgy, Valentin S. Teodorescu, Valentin S. Teodorescu, Gheorghe Marin, Gheorghe Marin, D. Pantelica, D. Pantelica, A. Andrei, A. Andrei, Johny Neamtu, Johny Neamtu, "New studies of reactive pulsed laser deposition", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312749; https://doi.org/10.1117/12.312749
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