2 July 1998 X-ray micromachining with a laser-plasma source at 1-nm wavelength
Author Affiliations +
Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312747
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania
Abstract
A picosecond excimer laser-plasma source has been constructed which generates an x-ray average power of 2.2 Watt and 1.4 Watt at the wavelengths required for proximity x-ray lithography: 1.4 nm (steel target) and 1 nm (copper target), respectively. The plasma source could be scaled to the 50 - 75 W x-ray average power required for industrial lithographic production by scaling the total average power of the commercial excimer laser system up to 1 kW. The 1 nm x-ray source is used to micromachine a 2.5 THz microwave waveguide-cavity package with a 48 micrometers deep, 3D structure, using the LIGA technique.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. C. Edmond Turcu, I. C. Edmond Turcu, Chris M. Mann, Chris M. Mann, Sung W. Moon, Sung W. Moon, B. J. Maddison, B. J. Maddison, Ric M. Allott, Ric M. Allott, Nicola Lisi, Nicola Lisi, Syed Ejazu Huq, Syed Ejazu Huq, Nam Seong Kim, Nam Seong Kim, "X-ray micromachining with a laser-plasma source at 1-nm wavelength", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312747; https://doi.org/10.1117/12.312747
PROCEEDINGS
12 PAGES


SHARE
RELATED CONTENT

Laser Plasma As X-Ray Source For Lithographic Imaging
Proceedings of SPIE (July 31 1989)
Pulsed Plasma Source For X-Ray Lithography
Proceedings of SPIE (July 27 1981)
Review of x-ray collimators for x-ray proximity lithography
Proceedings of SPIE (November 22 1999)
Recent developments of x-ray lithography in Canada
Proceedings of SPIE (July 31 1991)
Bright Discharge Plasma Sources For X-Ray Lithography
Proceedings of SPIE (June 19 1985)
X-ray lithography: a system integration effort
Proceedings of SPIE (June 24 1999)

Back to Top